News

Morgan Technical Ceramics Auburn (MTC Auburn), a leader in engineered ceramics, has introduced Sharkskin™, a new, innovative technology that can significantly improve process residue adhesion, decrease process-related defects and increase yields during the manufacturing of integrated circuits.

Sharkskin involves the highly controlled texturing of the surface of ceramic components. This texturing does not contaminate or destroy the integrity of the surface of the part as grit blasting does and, unlike arc sprays, is an integral and indistinguishable part of the ceramic surface. In addition, traditional technologies have reached their adhesion limits, rendering them ineffective for devices smaller than 65 nm.

Sharkskin is a technological advancement that increases the adhesion of high-stress films to ceramic components. At roughnesses of up to 1200 µ” Ra, a two-fold adhesion improvement over twin wire arc spray and plasma spray ceramic films has been demonstrated. The increased adhesion can prevent process residues on chamber components from flaking off onto the wafer.

Future use for this technology is anticipated in solar, medical and laser applications where high adhesion properties are required.

For further information please contact +1 ((530) 823 3401.